Inventor
AHMANN KURT J
US6 patents
⚠️ This page may combine multiple inventors who share the name “AHMANN KURT J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS7824498B2Nov 2, 2010
Coating for reducing contamination of substrates during processing
APPLIED MATERIALS INC28 citations90
US10053778B2Aug 21, 2018
Cooling pedestal with coating of diamond-like carbon
APPLIED MATERIALS INC5 citations82
US7804040B2Sep 28, 2010
Physical vapor deposition plasma reactor with arcing suppression
APPLIED MATERIALS INC10 citations79