Inventor
GONDHALEKAR SUDHIR
US9 patents
⚠️ This page may combine multiple inventors who share the name “GONDHALEKAR SUDHIR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS7722737B2May 25, 2010
Gas distribution system for improved transient phase deposition
APPLIED MATERIALS INC23 citations90
US6682603B2Jan 27, 2004
Substrate support with extended radio frequency electrode upper surface
APPLIED MATERIALS INC21 citations90
US7354501B2Apr 8, 2008
Upper chamber for high density plasma CVD
APPLIED MATERIALS INC39 citations89
US7074298B2Jul 11, 2006
High density plasma CVD chamber
APPLIED MATERIALS INC23 citations89
US7141138B2Nov 28, 2006
Gas delivery system for semiconductor processing
APPLIED MATERIALS INC13 citations83
US7498268B2Mar 3, 2009
Gas delivery system for semiconductor processing
APPLIED MATERIALS INC1 citations51