Inventor
INENAGA MASAMICHI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “INENAGA MASAMICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
YASKAWA DENKI SEISAKUSHO KK
4 patentsUS6384752B1May 7, 2002
Absolute encoder
YASKAWA DENKI SEISAKUSHO KK22 citations91
US7436513B2Oct 14, 2008
Wafer pre-alignment apparatus and method
YASKAWA DENKI SEISAKUSHO KK4 citations60
US7154113B2Dec 26, 2006
Techniques for wafer prealignment and sensing edge position
YASKAWA DENKI SEISAKUSHO KK2 citations60
US7109511B2Sep 19, 2006
Techniques for wafer prealignment and sensing edge positions
YASKAWA DENKI SEISAKUSHO KK5 citations60