Inventor
NAKAZAWA SHUSAKU
JP3 patents
Patents
3 patentsUS7405107B2Jul 29, 2008
Semiconductor device, method and apparatus for fabricating the same
DENSO CORP12 citations80
US7049688B2May 23, 2006
Semiconductor device having a pair of heat sinks and method for manufacturing the same
DENSO CORP5 citations59
US12417909B2Sep 16, 2025
Surface processing apparatus and surface processing method for SiC substrate
DENSO CORP0 citations57