P

Inventor

CHANG SHU-HAO

BE50 patents
⚠️ This page may combine multiple inventors who share the name “CHANG SHU-HAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

18 patents
US10018920B2Jul 10, 2018

Lithography patterning with a gas phase resist

TAIWAN SEMICONDUCTOR MFG CO LTD417 citations98
US9570302B1Feb 14, 2017

Method of patterning a material layer

TAIWAN SEMICONDUCTOR MFG CO LTD419 citations98
US10459352B2Oct 29, 2019

Mask cleaning

TAIWAN SEMICONDUCTOR MFG CO LTD10 citations84
US10274838B2Apr 30, 2019

System and method for performing lithography process in semiconductor device fabrication

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10067418B2Sep 4, 2018

Particle removal system and method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9665007B2May 30, 2017

Rotary EUV collector

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9607833B2Mar 28, 2017

System and method for photomask particle detection

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11921434B2Mar 5, 2024

Mask cleaning

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11740563B2Aug 29, 2023

Mask cleaning

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11256179B2Feb 22, 2022

Mask cleaning

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10976672B2Apr 13, 2021

System and method for performing lithography process in semiconductor device fabrication

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11624985B2Apr 11, 2023

Methods of defect inspection

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US10795270B2Oct 6, 2020

Methods of defect inspection

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations58
US10514610B2Dec 24, 2019

Lithography patterning with a gas phase resist

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9429858B2Aug 30, 2016

Rotary EUV collector

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations52
US8988652B2Mar 24, 2015

Method and apparatus for ultraviolet (UV) patterning with reduced outgassing

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10685846B2Jun 16, 2020

Semiconductor integrated circuit fabrication with pattern-reversing process

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41
US10825684B2Nov 3, 2020

Material composition and methods thereof

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations37

ELITE MATERIAL CO LTD

9 patents

E INK HOLDINGS INC

7 patents

TAIWAN SEMICONDUCTOR MFG

4 patents

INPRIA CORP

3 patents

AUO CORP

2 patents

SHIH CHIA-TSUNG

1 patent

AMBIT MICROSYSTEMS SHANGHAI

1 patent

AMBIT MICROSYSTEMS (SHANGHAI) LTD

1 patent

ELITE ELECTRONIC MAT KUNSHAN CO LTD

1 patent

ELITE ELECTRONIC MAT ZHONGSHAN CO LTD

1 patent

CHANG SHU-HAO

1 patent

DELTA ELECTRONICS INC

1 patent