Inventor
CHANG SHU-HAO
BE50 patents
⚠️ This page may combine multiple inventors who share the name “CHANG SHU-HAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
18 patentsUS10018920B2Jul 10, 2018
Lithography patterning with a gas phase resist
TAIWAN SEMICONDUCTOR MFG CO LTD417 citations98
US9570302B1Feb 14, 2017
Method of patterning a material layer
TAIWAN SEMICONDUCTOR MFG CO LTD419 citations98
US10459352B2Oct 29, 2019
Mask cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD10 citations84
US10274838B2Apr 30, 2019
System and method for performing lithography process in semiconductor device fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10067418B2Sep 4, 2018
Particle removal system and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9665007B2May 30, 2017
Rotary EUV collector
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9607833B2Mar 28, 2017
System and method for photomask particle detection
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11921434B2Mar 5, 2024
Mask cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11740563B2Aug 29, 2023
Mask cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11256179B2Feb 22, 2022
Mask cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10976672B2Apr 13, 2021
System and method for performing lithography process in semiconductor device fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11624985B2Apr 11, 2023
Methods of defect inspection
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US10795270B2Oct 6, 2020
Methods of defect inspection
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations58
US10514610B2Dec 24, 2019
Lithography patterning with a gas phase resist
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9429858B2Aug 30, 2016
Rotary EUV collector
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations52
US8988652B2Mar 24, 2015
Method and apparatus for ultraviolet (UV) patterning with reduced outgassing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10685846B2Jun 16, 2020
Semiconductor integrated circuit fabrication with pattern-reversing process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41
US10825684B2Nov 3, 2020
Material composition and methods thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations37
ELITE MATERIAL CO LTD
9 patentsUS11111383B2Sep 7, 2021
Resin composition and article made therefrom
ELITE MATERIAL CO LTD2 citations73
US10894865B2Jan 19, 2021
Prepolymerized resin, preparation method thereof, resin composition comprising the same, and article made therefrom
ELITE MATERIAL CO LTD2 citations73
US12534572B2Jan 27, 2026
Resin composition and article made therefrom
ELITE MATERIAL CO LTD0 citations62
US11643507B2May 9, 2023
Prepolymerized resin, preparation method thereof, resin composition comprising the same, and article made therefrom
ELITE MATERIAL CO LTD0 citations62
US11384239B2Jul 12, 2022
Resin composition and article made therefrom
ELITE MATERIAL CO LTD1 citations62
US12486397B2Dec 2, 2025
Resin composition and article manufactured using the same
ELITE MATERIAL CO LTD0 citations58
US12122912B2Oct 22, 2024
Composition comprising maleimide pre-polymerized resin
ELITE MATERIAL CO LTD0 citations52
US10557033B2Feb 11, 2020
Resin composition suitable for rigid-flex board and use thereof
ELITE MATERIAL CO LTD0 citations52
US10865221B2Dec 15, 2020
Phosphorus-containing flame retardant, preparation method thereof, resin composition comprising the phosphorus-containing flame retardant and article made therefrom
ELITE MATERIAL CO LTD0 citations49
E INK HOLDINGS INC
7 patentsUS9569993B2Feb 14, 2017
Pixel array comprising selection lines
E INK HOLDINGS INC4 citations72
US9247615B2Jan 26, 2016
Display panel
E INK HOLDINGS INC2 citations63
US8853555B2Oct 7, 2014
Bonding structure
E INK HOLDINGS INC2 citations62
US9780123B2Oct 3, 2017
Display panel
E INK HOLDINGS INC0 citations52
US9542879B2Jan 10, 2017
Display panel
E INK HOLDINGS INC1 citations49
US9190403B2Nov 17, 2015
Display panel
E INK HOLDINGS INC1 citations49
US9268192B2Feb 23, 2016
Electrophoretic display apparatus
E INK HOLDINGS INC0 citations42
TAIWAN SEMICONDUCTOR MFG
4 patentsUS9140987B2Sep 22, 2015
Method for lithography patterning
TAIWAN SEMICONDUCTOR MFG7 citations82
US9229326B2Jan 5, 2016
Method for integrated circuit patterning
TAIWAN SEMICONDUCTOR MFG4 citations73
US9389506B2Jul 12, 2016
Photoresist having improved extreme-ultraviolet lithography imaging performance
TAIWAN SEMICONDUCTOR MFG1 citations52
US9159559B2Oct 13, 2015
Lithography layer with quenchers to prevent pattern collapse
TAIWAN SEMICONDUCTOR MFG1 citations52
INPRIA CORP
3 patentsUS12399426B2Aug 26, 2025
Patterned organometallic photoresists and methods of patterning
INPRIA CORP0 citations60
US11480874B2Oct 25, 2022
Patterned organometallic photoresists and methods of patterning
INPRIA CORP0 citations60
US12360454B2Jul 15, 2025
Stabilized interfaces of inorganic radiation patterning compositions on substrates
INPRIA CORP0 citations51