Inventor
DAVIESS SHANNON E
US3 patents
Patents
3 patentsUS7648803B2Jan 19, 2010
Diagonal corner-to-corner sub-resolution assist features for photolithography
INTEL CORP10 citations82
US7572557B2Aug 11, 2009
Non-collinear end-to-end structures with sub-resolution assist features
INTEL CORP6 citations61
US7521157B2Apr 21, 2009
Cross-shaped sub-resolution assist feature
INTEL CORP5 citations61