Inventor

BECKFORD HOWARD

US6 patents

⚠️ This page may combine multiple inventors who share the name “BECKFORD HOWARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

4 patents

US7976634B2Jul 12, 2011

Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems

APPLIED MATERIALS INC18 citations89

US7560352B2Jul 14, 2009

Selective deposition

APPLIED MATERIALS INC15 citations84

US7709391B2May 4, 2010

Methods for in-situ generation of reactive etch and growth specie in film formation processes

APPLIED MATERIALS INC8 citations83

US7718225B2May 18, 2010

Method to control semiconductor film deposition characteristics

APPLIED MATERIALS INC3 citations61

CARLSON DAVID KEITH

1 patent

US8663390B2Mar 4, 2014

Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems

CARLSON DAVID KEITH12 citations78

KUPPURAO SATHEESH

1 patent

US8991332B2Mar 31, 2015

Apparatus to control semiconductor film deposition characteristics

KUPPURAO SATHEESH0 citations45