Inventor

PANDEY NITESH

NL57 patents

⚠️ This page may combine multiple inventors who share the name “PANDEY NITESH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PANDEY NITESH

ASML NETHERLANDS BV

Metrology system and method for determining a characteristic of one or more structures on a substrate

Metrology apparatus for measuring a structure formed on a substrate by a lithographic process, lithographic system, and method of measuring a structure formed on a substrate by a lithographic process

Method and apparatus for improving measurement accuracy

Metrology system and method for determining a characteristic of one or more structures on a substrate

Metrology apparatus

Metrology apparatus, lithographic system, and method of measuring a structure

Method of measuring a structure, inspection apparatus, lithographic system, device manufacturing method and wavelength-selective filter for use therein

Adjustment of a metrology apparatus or a measurement thereby based on a characteristic of a target measured

Topography measurement system

Method of measuring a structure, inspection apparatus, lithographic system, device manufacturing method and wavelength-selective filter for use therein

Illumination system for a lithographic or inspection apparatus

Metrology apparatus

Metrology method, patterning device, apparatus and computer program

Metrology apparatus

Metrology method, patterning device, apparatus and computer program

Scatterometer and method of scatterometry using acoustic radiation

Method of measuring a parameter of interest, device manufacturing method, metrology apparatus, and lithographic system

Method of measuring a target, metrology apparatus, polarizer assembly

Radiation receiving system

Metrology apparatus, lithographic system, and method of measuring a structure

Metrology method and apparatus, computer program and lithographic system

Method and apparatus for measuring a parameter of interest using image plane detection techniques

Metrology apparatus, lithographic system, and method of measuring a structure

Method of determining a value of a parameter of interest, method of cleaning a signal containing information about a parameter of interest, device manufacturing method

Metrology sensor, lithographic apparatus and method for manufacturing devices

Method of measuring, device manufacturing method, metrology apparatus, and lithographic system

Metrology apparatus

Dark field digital holographic microscope and associated metrology method

Metrology system and method for determining a characteristic of one or more structures on a substrate

Illumination and detection apparatus for a metrology apparatus

Metrology system and method for determining a characteristic of one or more structures on a substrate

Apparatus and methods for determining the position of a target structure on a substrate

Metrology device and detection apparatus therefor

Metrology apparatus and photonic crystal fiber

Metrology apparatus

Scatterometer and method of scatterometry using acoustic radiation

Metrology apparatus and method for determining a characteristic of one or more structures on a substrate

Adjustment of a metrology apparatus or a measurement thereby based on a characteristic of a target measured

Topography measurement system

Method for parameter determination and apparatus thereof

Method of measuring a target, metrology apparatus, polarizer assembly

Device and method for processing a radiation beam with coherence

Method of measuring, device manufacturing method, metrology apparatus, and lithographic system

Metrology apparatus, lithographic system, and method of measuring a structure

Metrology method and apparatus for of determining a complex-valued field

Metrology method and device for determining a complex-valued field

Micromirror arrays

Micromirror arrays

Metrology method and apparatus

VRIJE UNIV AMSTERDAM

Inspection apparatus, inspection method and manufacturing method