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Inventor
SHIMAZAKI RYUTA
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “SHIMAZAKI RYUTA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOYA GO
1 patent
US8101333B2
Jan 24, 2012
Method for formation of miniaturized pattern and resist substrate treatment solution for use in the method
NOYA GO
13 citations
78
AZ ELECTRONIC MATERIALS USA
1 patent
US7998664B2
Aug 16, 2011
Processing liquid for resist substrate and method of processing resist substrate using the same
AZ ELECTRONIC MATERIALS USA
4 citations
59