Inventor
DICTUS DRIES
BE14 patents
⚠️ This page may combine multiple inventors who share the name “DICTUS DRIES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
7 patentsUS12346035B2Jul 1, 2025
Process tool for dry removal of photoresist
LAM RES CORP6 citations73
US12564039B2Feb 24, 2026
Doping processes in metal interconnect structures
LAM RES CORP0 citations61
US11984354B2May 14, 2024
Zincating and doping of metal liner for liner passivation and adhesion improvement
LAM RES CORP0 citations61
US11424158B2Aug 23, 2022
Metal liner passivation and adhesion enhancement by zinc doping
LAM RES CORP0 citations57
US12577466B2Mar 17, 2026
Photoresist development with organic vapor
LAM RES CORP0 citations56
US9142456B2Sep 22, 2015
Method for capping copper interconnect lines
LAM RES CORP0 citations51
US10741440B2Aug 11, 2020
Metal liner passivation and adhesion enhancement by zinc doping
LAM RES CORP0 citations47
LAM RES AG
3 patentsUS10106737B2Oct 23, 2018
Liquid mixture and method for selectively wet etching silicon germanium
LAM RES AG8 citations83
US10815573B2Oct 27, 2020
Passivation mixture and systems and methods for selectively passivating substrate materials including germanium or type III-IV materials using the passivation mixture
LAM RES AG0 citations50
US11854792B2Dec 26, 2023
Systems and methods for preventing stiction of high aspect ratio structures and/or repairing high aspect ratio structures
LAM RES AG0 citations40