Inventor
NICOLAIDES LENA
US39 patents
⚠️ This page may combine multiple inventors who share the name “NICOLAIDES LENA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
20 patentsUS9772297B2Sep 26, 2017
Apparatus and methods for combined brightfield, darkfield, and photothermal inspection
KLA TENCOR CORP12 citations84
US7502104B2Mar 10, 2009
Probe beam profile modulated optical reflectance system and methods
KLA TENCOR CORP15 citations84
US10563973B2Feb 18, 2020
All surface film metrology system
KLA TENCOR CORP11 citations81
US9709386B1Jul 18, 2017
Apparatus and methods for measuring properties in a TSV structure using beam profile reflectometry
KLA TENCOR CORP10 citations81
US7660686B1Feb 9, 2010
Ion implant metrology system with fault detection and identification
KLA TENCOR CORP9 citations81
US10599951B2Mar 24, 2020
Training a neural network for defect detection in low resolution images
KLA TENCOR CORP19 citations80
US9645097B2May 9, 2017
In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning
KLA TENCOR CORP10 citations80
US7755752B1Jul 13, 2010
Combined modulated optical reflectance and photoreflectance system
KLA TENCOR CORP19 citations80
US7705977B2Apr 27, 2010
Methods for depth profiling in semiconductors using modulated optical reflectance technology
KLA TENCOR CORP6 citations74
US7362441B2Apr 22, 2008
Modulated reflectance measurement system using UV probe
KLA TENCOR CORP6 citations74
US10533954B2Jan 14, 2020
Apparatus and methods for combined brightfield, darkfield, and photothermal inspection
KLA TENCOR CORP2 citations73
US9640449B2May 2, 2017
Automated inline inspection of wafer edge strain profiles using rapid photoreflectance spectroscopy
KLA TENCOR CORP5 citations71
US9747520B2Aug 29, 2017
Systems and methods for enhancing inspection sensitivity of an inspection tool
KLA TENCOR CORP5 citations69
US7982867B2Jul 19, 2011
Methods for depth profiling in semiconductors using modulated optical reflectance technology
KLA TENCOR CORP2 citations63
US7646486B2Jan 12, 2010
Modulated reflectance measurement system using UV probe
KLA TENCOR CORP3 citations63
US7619741B2Nov 17, 2009
Modulated reflectance measurement system with multiple wavelengths
KLA TENCOR CORP3 citations63
US7499168B2Mar 3, 2009
Combined modulated optical reflectance and electrical system for ultra-shallow junctions applications
KLA TENCOR CORP5 citations63
US7423757B2Sep 9, 2008
Modulated reflectance measurement system with multiple wavelengths
KLA TENCOR CORP3 citations63
US8962351B1Feb 24, 2015
Dopant metrology with information feedforward and feedback
KLA TENCOR CORP0 citations52
US7330260B2Feb 12, 2008
Method for measuring ion-implanted semiconductors with improved repeatability
KLA TENCOR CORP1 citations49
THERMA WAVE INC
11 patentsUS7106446B2Sep 12, 2006
Modulated reflectance measurement system with multiple wavelengths
THERMA WAVE INC18 citations92
US6989899B2Jan 24, 2006
Ion implant monitoring through measurement of modulated optical response
THERMA WAVE INC15 citations92
US6917039B2Jul 12, 2005
Method and system for combined photothermal modulated reflectance and photothermal IR radiometric system
THERMA WAVE INC21 citations92
US7280215B2Oct 9, 2007
Photothermal system with spectroscopic pump and probe
THERMA WAVE INC18 citations84
US7212288B2May 1, 2007
Position modulated optical reflectance measurement system for semiconductor metrology
THERMA WAVE INC12 citations84
US7248367B2Jul 24, 2007
Characterization of ultra shallow junctions in semiconductor wafers
THERMA WAVE INC7 citations74
US7116424B2Oct 3, 2006
Modulated reflectance measurement system with multiple wavelengths
THERMA WAVE INC9 citations74
US7079249B2Jul 18, 2006
Modulated reflectance measurement system with fiber laser technology
THERMA WAVE INC9 citations74
US7126690B2Oct 24, 2006
Modulated reflectance measurement system using UV probe
THERMA WAVE INC1 citations63
US7060980B2Jun 13, 2006
Method and system for combined photothermal modulated reflectance and photothermal IR radiometric system
THERMA WAVE INC3 citations63
US7002690B2Feb 21, 2006
Ion implant monitoring through measurement of modulated optical response
THERMA WAVE INC3 citations63