Inventor
HARADA AKITOSHI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “HARADA AKITOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS7125806B2Oct 24, 2006
Etching method
TOKYO ELECTRON LTD8 citations72
US10217616B2Feb 26, 2019
Method of controlling temperature and plasma processing apparatus
TOKYO ELECTRON LTD3 citations70
US7119011B2Oct 10, 2006
Semiconductor device and manufacturing method thereof
TOKYO ELECTRON LTD2 citations61
US10043637B2Aug 7, 2018
Plasma processing apparatus and particle adhesion preventing method
TOKYO ELECTRON LTD1 citations51
US7608544B2Oct 27, 2009
Etching method and storage medium
TOKYO ELECTRON LTD0 citations49
US9953862B2Apr 24, 2018
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations48
US9330891B2May 3, 2016
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations48
US9209041B2Dec 8, 2015
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations48
US9460896B2Oct 4, 2016
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations39
US10192719B2Jan 29, 2019
Plasma processing method
TOKYO ELECTRON LTD0 citations37