Inventor
VERBURG COR
NL6 patents
⚠️ This page may combine multiple inventors who share the name “VERBURG COR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VERBURG COR
2 patentsDE BOER GUIDO
2 patentsUS9201315B2Dec 1, 2015
Lithography system for processing a target, such as a wafer, a method for operating a lithography system for processing a target, such as a wafer and a substrate for use in such a lithography system
DE BOER GUIDO2 citations59
US9395636B2Jul 19, 2016
Lithography system for processing a target, such as a wafer, and a method for operating a lithography system for processing a target, such as a wafer
DE BOER GUIDO0 citations48