Inventor
TAKASHIMA YUTA
JP10 patents
⚠️ This page may combine multiple inventors who share the name “TAKASHIMA YUTA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GIGAPHOTON INC
8 patentsUS10667376B2May 26, 2020
Target supply device, extreme ultraviolet light generation device, and target supply method
GIGAPHOTON INC3 citations71
US10225917B2Mar 5, 2019
Target supply device and extreme ultraviolet light generating device
GIGAPHOTON INC2 citations68
US10955751B2Mar 23, 2021
Extreme ultraviolet light generation apparatus and electronic device manufacturing method
GIGAPHOTON INC1 citations61
US11219116B1Jan 4, 2022
Extreme ultraviolet light generation system and electronic device manufacturing method
GIGAPHOTON INC0 citations51
US11924954B2Mar 5, 2024
Extreme ultraviolet light generation apparatus and electronic device manufacturing method
GIGAPHOTON INC0 citations50
US11228156B2Jan 18, 2022
Laser system and extreme ultraviolet light generation system
GIGAPHOTON INC0 citations50
US11092896B2Aug 17, 2021
Extreme ultraviolet light generation apparatus and electronic device manufacturing method
GIGAPHOTON INC0 citations48
US10375809B2Aug 6, 2019
Extreme ultraviolet light generation device and method for controlling extreme ultraviolet light generation device
GIGAPHOTON INC0 citations45