Inventor
Yun Ji-Eun
KR2 patents
Patents
2 patentsUS11062940B2Jul 13, 2021
Organometallic precursors, methods of forming a layer using the same and methods of manufacturing semiconductor devices using the same
SAMSUNG ELECTRONICS CO LTD0 citations60
US10361118B2Jul 23, 2019
Organometallic precursors, methods of forming a layer using the same and methods of manufacturing semiconductor devices using the same
SAMSUNG ELECTRONICS CO LTD0 citations49