Inventor
CHOI JAE-HYUCK
KR16 patents
⚠️ This page may combine multiple inventors who share the name “CHOI JAE-HYUCK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
10 patentsUS10437145B2Oct 8, 2019
Method of detaching a pellicle from a photomask
SAMSUNG ELECTRONICS CO LTD4 citations72
US9880462B2Jan 30, 2018
Pellicle and exposure mask including the same
SAMSUNG ELECTRONICS CO LTD3 citations72
US9690190B2Jun 27, 2017
Pellicles and methods of manufacturing the same
SAMSUNG ELECTRONICS CO LTD3 citations72
US10073337B2Sep 11, 2018
Pellicle and photomask assembly including the same
SAMSUNG ELECTRONICS CO LTD5 citations70
US10042246B2Aug 7, 2018
Method of manufacturing photomask
SAMSUNG ELECTRONICS CO LTD0 citations48
US9417518B2Aug 16, 2016
Photomask and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD0 citations48
US10217635B2Feb 26, 2019
Method of manufacturing semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations47
US9436077B2Sep 6, 2016
Method of fabricating a pellicle frame
SAMSUNG ELECTRONICS CO LTD0 citations47
US7989123B2Aug 2, 2011
Photomask including ion trapping layer and method of manufacturing semiconductor device using the photomask
SAMSUNG ELECTRONICS CO LTD0 citations47
US9341941B2May 17, 2016
Reflective photomask blank, reflective photomask, and integrated circuit device manufactured by using reflective photomask
SAMSUNG ELECTRONICS CO LTD0 citations46