Inventor

YEH MING-HSI

TW131 patents

⚠️ This page may combine multiple inventors who share the name “YEH MING-HSI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YEH MING-HSI

TAIWAN SEMICONDUCTOR MFG CO LTD

Method and structure for metal gates

Method and structure for metal gates

Footing removal in cut-metal process

Self-protective layer formed on high-K dielectric layer

Metal gate structure and methods thereof

Self-protective layer formed on high-k dielectric layers with different materials

Self-protective layer formed on high-k dielectric layer

Method for semiconductor device fabrication

Wet etch chemistry for selective silicon etch

Method of manufacturing a semiconductor device

Fin field-effect transistor device and method of forming the same

Method of manufacturing a semiconductor device

Fin field-effect transistor device and method of forming the same

Gate stack structure and method for forming the same

Metal gate structure and methods thereof

Metal gate structure and methods thereof

Wet cleaning with tunable metal recess for via plugs

Semiconductor device and method of manufacture using a contact etch stop layer (CESL) breakthrough process

Semiconductor device and method

Controlling fin-thinning through feedback

Method of breaking through etch stop layer

Wet etch chemistry for selective silicon etch

High-K metal gate and method for fabricating the same

Cleaning method for semiconductor device fabrication

Wet etching chemistry and method of forming semiconductor device using the same

Method of manufacturing a semiconductor device

Gate spacer structures and methods for forming the same

Wet cleaning with tunable metal recess for via plugs

Fin field-effect transistor and method of forming the same

Gate resistance improvement and method thereof

Fin Field-Effect Transistor device and method of forming the same

Fin field-effect transistor device and method of forming the same

Semiconductor device and method of manufacture

Fin field-effect transistor device having hybrid work function layer stack

Semiconductor device and method

Fin field-effect transistor with a gate structure having a dielectric protection layer

Controlling fin-thinning through feedback

Semiconductor device and method of manufacture

Fin field-effect transistor and method of forming the same

Semiconductor device and method of manufacture

YEH MING-HSI

Finlike structures and methods of making same

Method of fabricating an integrated circuit device

In-situ backside cleaning of semiconductor substrate

Cleaning process for semiconductor device fabrication

TAIWAN SEMICONDUCTOR MFG

Finlike structures and methods of making same

Method of fabricating epitaxial structures

Finlike structures and methods of making same

YU WEIBO

Method of semiconductor integrated circuit fabrication

IND TECH RES INST

Thermosensitive biodegradable copolymer

CHIEN YING-HSUEH CHANG

Apparatus and methods for movable megasonic wafer probe