Inventor
CHEN FUPING
CN38 patents
Patents
38 patentsUS11581205B2Feb 14, 2023
Methods and system for cleaning semiconductor wafers
ACM RESEARCH SHANGHAI INC2 citations73
US11257667B2Feb 22, 2022
Methods and apparatus for cleaning semiconductor wafers
ACM RESEARCH SHANGHAI INC2 citations73
US11141762B2Oct 12, 2021
System for cleaning semiconductor wafers
ACM RESEARCH SHANGHAI INC3 citations73
US11037804B2Jun 15, 2021
Methods and apparatus for cleaning substrates
ACM RESEARCH SHANGHAI INC2 citations73
US10910244B2Feb 2, 2021
Methods and system for cleaning semiconductor wafers
ACM RESEARCH SHANGHAI INC2 citations73
US10297472B2May 21, 2019
Method and apparatus for cleaning semiconductor wafer
ACM RESEARCH SHANGHAI INC5 citations72
US10410906B2Sep 10, 2019
Substrate supporting apparatus
ACM RESEARCH SHANGHAI INC3 citations68
US12111575B2Oct 8, 2024
Coater with automatic cleaning function and coater automatic cleaning method
ACM RESEARCH SHANGHAI INC0 citations62
US11967497B2Apr 23, 2024
Methods and apparatus for cleaning semiconductor wafers
ACM RESEARCH SHANGHAI INC0 citations62
US11955328B2Apr 9, 2024
Method and apparatus for cleaning semiconductor wafer
ACM RESEARCH SHANGHAI INC0 citations62
US11911808B2Feb 27, 2024
System for cleaning semiconductor wafers
ACM RESEARCH SHANGHAI INC0 citations62
US11911807B2Feb 27, 2024
Method and apparatus for cleaning substrates
ACM RESEARCH SHANGHAI INC0 citations62
US11848217B2Dec 19, 2023
Methods and apparatus for cleaning substrates
ACM RESEARCH SHANGHAI INC0 citations62
US11752529B2Sep 12, 2023
Method for cleaning semiconductor wafers
ACM RESEARCH SHANGHAI INC0 citations62
US11638937B2May 2, 2023
Methods and apparatus for cleaning substrates
ACM RESEARCH SHANGHAI INC0 citations62
US11633765B2Apr 25, 2023
System for cleaning semiconductor wafers
ACM RESEARCH SHANGHAI INC0 citations62
US11629425B2Apr 18, 2023
Method and apparatus for uniformly metallization on substrate
ACM RESEARCH SHANGHAI INC0 citations62
US11498100B2Nov 15, 2022
Apparatus for cleaning semiconductor substrates
ACM RESEARCH SHANGHAI INC0 citations62
US11462423B2Oct 4, 2022
Method and apparatus for cleaning semiconductor wafer
ACM RESEARCH SHANGHAI INC0 citations62
US11335550B2May 17, 2022
Method and apparatus for cleaning semiconductor wafer
ACM RESEARCH SHANGHAI INC0 citations62
US11103898B2Aug 31, 2021
Methods and apparatus for cleaning substrates
ACM RESEARCH SHANGHAI INC0 citations62
US10907266B2Feb 2, 2021
Method and apparatus for uniformly metallization on substrate
ACM RESEARCH SHANGHAI INC0 citations62
US12494360B2Dec 9, 2025
Apparatus and method for cleaning semiconductor wafers
ACM RESEARCH SHANGHAI INC0 citations60
US12068149B2Aug 20, 2024
Apparatus and method for cleaning semiconductor wafers
ACM RESEARCH SHANGHAI INC0 citations60
US11854842B2Dec 26, 2023
Substrate heat treatment apparatus
ACM RESEARCH SHANGHAI INC0 citations60
US12186684B2Jan 7, 2025
Method and apparatus for cleaning substrates using high temperature chemicals and ultrasonic device
ACM RESEARCH SHANGHAI INC0 citations58
US11925881B2Mar 12, 2024
Method and apparatus for cleaning substrates using high temperature chemicals and ultrasonic device
ACM RESEARCH SHANGHAI INC0 citations58
US11000782B2May 11, 2021
Method and apparatus for cleaning substrates using high temperature chemicals and ultrasonic device
ACM RESEARCH SHANGHAI INC0 citations58
US12100586B2Sep 24, 2024
Substrate cleaning method and apparatus
ACM RESEARCH SHANGHAI INC0 citations52
US12062556B2Aug 13, 2024
Methods and apparatus for cleaning semiconductor wafers
ACM RESEARCH SHANGHAI INC0 citations52
US11876005B2Jan 16, 2024
Methods and apparatus for cleaning flip chip assemblies
ACM RESEARCH SHANGHAI INC0 citations52
US10113244B2Oct 30, 2018
Method and apparatus for uniformly metallization on substrate
ACM RESEARCH SHANGHAI INC0 citations52
US12482697B2Nov 25, 2025
Substrate supporting apparatus
ACM RESEARCH SHANGHAI INC0 citations51
US10816901B2Oct 27, 2020
Coater with automatic cleaning function and coater automatic cleaning method
ACM RESEARCH SHANGHAI INC0 citations51
US10770315B2Sep 8, 2020
Fall-proof apparatus for cleaning semiconductor devices and a chamber with the apparatus
ACM RESEARCH SHANGHAI INC0 citations50
US12334367B2Jun 17, 2025
Method and apparatus for removing particles or photoresist on substrates
ACM RESEARCH SHANGHAI INC0 citations49
US12518961B2Jan 6, 2026
Wafer backside cleaning method
ACM RESEARCH SHANGHAI INC0 citations45
US10770335B2Sep 8, 2020
Substrate supporting apparatus
ACM RESEARCH SHANGHAI INC0 citations40