Inventor
WANG DEYUN
CN6 patents
⚠️ This page may combine multiple inventors who share the name “WANG DEYUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ACM RESEARCH SHANGHAI INC
4 patentsUS12494360B2Dec 9, 2025
Apparatus and method for cleaning semiconductor wafers
ACM RESEARCH SHANGHAI INC0 citations60
US12068149B2Aug 20, 2024
Apparatus and method for cleaning semiconductor wafers
ACM RESEARCH SHANGHAI INC0 citations60
US12334367B2Jun 17, 2025
Method and apparatus for removing particles or photoresist on substrates
ACM RESEARCH SHANGHAI INC0 citations49
US12518961B2Jan 6, 2026
Wafer backside cleaning method
ACM RESEARCH SHANGHAI INC0 citations45