Inventor
IU DONGMING
US22 patents
Patents
22 patentsUSD796562SSep 5, 2017
Plasma outlet liner
APPLIED MATERIALS INC17 citations92
USD807481SJan 9, 2018
Patterned heater pedestal
APPLIED MATERIALS INC15 citations84
US10202707B2Feb 12, 2019
Substrate processing system with lamphead having temperature management
APPLIED MATERIALS INC4 citations73
US10571337B2Feb 25, 2020
Thermal cooling member with low temperature control
APPLIED MATERIALS INC2 citations72
US9768043B2Sep 19, 2017
Quartz upper and lower domes
APPLIED MATERIALS INC4 citations72
US11348769B2May 31, 2022
Plasma-enhanced anneal chamber for wafer outgassing
APPLIED MATERIALS INC5 citations71
US10770272B2Sep 8, 2020
Plasma-enhanced anneal chamber for wafer outgassing
APPLIED MATERIALS INC5 citations71
US11562915B2Jan 24, 2023
Methods, systems, and apparatus for optically monitoring individual lamps
APPLIED MATERIALS INC3 citations69
US11901195B2Feb 13, 2024
Methods, systems, and apparatus for conducting a radical treatment operation prior to conducting an annealing operation
APPLIED MATERIALS INC2 citations67
US12588456B2Mar 24, 2026
Reflector plate for substrate processing
APPLIED MATERIALS INC0 citations62
US12176242B2Dec 24, 2024
Rotatable thermal processing chamber
APPLIED MATERIALS INC0 citations62
US10948353B2Mar 16, 2021
Thermal processing chamber with low temperature control
APPLIED MATERIALS INC0 citations62
US11817297B2Nov 14, 2023
System and method for managing substrate outgassing
APPLIED MATERIALS INC1 citations61
US11664250B2May 30, 2023
Methods and apparatus for measuring edge ring temperature
APPLIED MATERIALS INC0 citations60
US11342209B2May 24, 2022
Methods and apparatus for measuring edge ring temperature
APPLIED MATERIALS INC0 citations60
USD877784SMar 10, 2020
Plasma outlet liner
APPLIED MATERIALS INC1 citations59
US12593666B2Mar 31, 2026
Methods, systems, and apparatus for conducting a radical treatment operation prior to conducting an annealing operation
APPLIED MATERIALS INC0 citations57
US11978646B2May 7, 2024
Thermal chamber with improved thermal uniformity
APPLIED MATERIALS INC0 citations57
US10741428B2Aug 11, 2020
Semiconductor processing chamber
APPLIED MATERIALS INC1 citations57
US11694919B2Jul 4, 2023
Vacuum chuck pressure control system
APPLIED MATERIALS INC0 citations52
US10405375B2Sep 3, 2019
Lamphead PCB with flexible standoffs
APPLIED MATERIALS INC0 citations51
US10026630B2Jul 17, 2018
Retention and insulation features for lamp
APPLIED MATERIALS INC0 citations51