Inventor

TAM NORMAN L

US24 patents

⚠️ This page may combine multiple inventors who share the name “TAM NORMAN L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAM NORMAN L

APPLIED MATERIALS INC

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Thermal reactor with improved gas flow distribution

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Thermal cooling member with low temperature control

Apparatus and method for improved control of heating and cooling of substrates

Plasma-enhanced anneal chamber for wafer outgassing

Plasma-enhanced anneal chamber for wafer outgassing

Visual feedback for process control in RTP chambers

Visual feedback for process control in RTP chambers

Methods, systems, and apparatus for conducting a radical treatment operation prior to conducting an annealing operation

Thermal processing chamber with low temperature control

Method of improving oxide growth rate of selective oxidation processes

System and method for radical and thermal processing of substrates

Treatment methods for titanium nitride films

System and method for radical and thermal processing of substrates

System and method for radical and thermal processing of substrates

Treatment methods for silicon nanosheet surfaces using hydrogen radicals

Methods, systems, and apparatus for conducting a radical treatment operation prior to conducting an annealing operation

Thermal chamber with improved thermal uniformity

Apparatus for reducing the effect of contamination on a rapid thermal process

Catalyst enhanced molybdenum deposition and gap fill

KOELMEL BLAKE R

Apparatus and method for improved control of heating and cooling of substrates