Inventor
WANG YI-LIN
TW6 patents
⚠️ This page may combine multiple inventors who share the name “WANG YI-LIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
5 patentsUS10533852B1Jan 14, 2020
Leveling sensor, load port including the same, and method of leveling a load port
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US11827970B2Nov 28, 2023
Shutter disc for a semiconductor processing tool
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations67
US12112930B2Oct 8, 2024
Method for improving deposition process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11022437B2Jun 1, 2021
Leveling sensor, load port including the same, and method of leveling a load port
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US12215414B2Feb 4, 2025
Shutter disc for a semiconductor processing tool
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations58