Inventor
FANG WEN-HAN
TW13 patents
Patents
13 patentsUS10651311B2May 12, 2020
Metal gate with silicon sidewall spacers
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations83
US10134861B2Nov 20, 2018
Semiconductor device structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations83
US9496402B2Nov 15, 2016
Metal gate with silicon sidewall spacers
TAIWAN SEMICONDUCTOR MFG CO LTD9 citations83
US11527636B2Dec 13, 2022
Semiconductor device structure with work function layer and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11469145B2Oct 11, 2022
Method for forming semiconductor device structure with gate and resulting structures
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US10763341B2Sep 1, 2020
Semiconductor device structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US9799565B2Oct 24, 2017
Method for forming semiconductor device structure with gate
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US12310052B2May 20, 2025
Metal gate with silicon sidewall spacers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12136572B2Nov 5, 2024
Method for forming semiconductor device structure with gate and resulting structures
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12002871B2Jun 4, 2024
Semiconductor device structure with work function layer and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11437518B2Sep 6, 2022
Metal gate with silicon sidewall spacers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10522411B2Dec 31, 2019
Method for forming semiconductor device structure with gate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9437472B2Sep 6, 2016
Semiconductor line feature and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations51