Inventor
HARA HIROMI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “HARA HIROMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS10032642B2Jul 24, 2018
Substrate liquid processing apparatus
TOKYO ELECTRON LTD2 citations73
US12322631B2Jun 3, 2025
Substrate processing system, substrate processing method, and recording medium
TOKYO ELECTRON LTD4 citations72
US11056360B2Jul 6, 2021
Substrate liquid processing apparatus and method, and computer-redable storage medium stored with substrate liquid processing program
TOKYO ELECTRON LTD0 citations62
US10607849B2Mar 31, 2020
Substrate liquid processing apparatus, substrate liquid processing method, and computer-readable storage medium storing substrate liquid processing program
TOKYO ELECTRON LTD1 citations62
US10460964B2Oct 29, 2019
Substrate liquid processing apparatus and method, and computer-readable storage medium stored with substrate liquid processing program
TOKYO ELECTRON LTD0 citations52
US11062922B2Jul 13, 2021
Substrate liquid processing apparatus
TOKYO ELECTRON LTD0 citations51
US10985035B2Apr 20, 2021
Substrate liquid processing apparatus, substrate liquid processing method and computer readable recording medium having substrate liquid processing program recorded therein
TOKYO ELECTRON LTD0 citations50
US10811266B2Oct 20, 2020
Substrate liquid processing apparatus and method, and computer-readable storage medium storing substrate liquid processing program
TOKYO ELECTRON LTD0 citations39
US9887092B2Feb 6, 2018
Etching method, etching apparatus, and storage medium
TOKYO ELECTRON LTD0 citations36
SATO HIDEAKI
2 patentsUS8777695B2Jul 15, 2014
Ultrasonic cleaning apparatus, ultrasonic cleaning method, and storage medium storing computer program for executing ultrasonic cleaning method
SATO HIDEAKI4 citations69
US8803039B2Aug 12, 2014
Heating unit, substrate processing apparatus, and method for heating fluid
SATO HIDEAKI2 citations61