Inventor
TSUKINOKI WATARU
JP6 patents
⚠️ This page may combine multiple inventors who share the name “TSUKINOKI WATARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS8043039B2Oct 25, 2011
Substrate treatment apparatus
TOKYO ELECTRON LTD10 citations82
US12322631B2Jun 3, 2025
Substrate processing system, substrate processing method, and recording medium
TOKYO ELECTRON LTD4 citations72
US8369977B2Feb 5, 2013
Coating and developing apparatus
TOKYO ELECTRON LTD0 citations38
TSUKINOKI WATARU
3 patentsUS8731701B2May 20, 2014
Substrate treatment method and substrate treatment system
TSUKINOKI WATARU12 citations81
US8909364B2Dec 9, 2014
Substrate processing system and substrate processing method
TSUKINOKI WATARU5 citations70
US8219233B2Jul 10, 2012
Substrate treatment apparatus
TSUKINOKI WATARU3 citations57