Inventor
BLUM SAMUEL E
US7 patents
Patents
7 patentsUS4784135ANov 15, 1988
Far ultraviolet surgical and dental procedures
IBM374 citations97
US4414059ANov 8, 1983
Far UV patterning of resist materials
IBM198 citations97
US4568632AFeb 4, 1986
Patterning of polyimide films with far ultraviolet light
IBM110 citations94
US4239789ADec 16, 1980
Maskless method for electroless plating patterns
IBM43 citations92
US4451503AMay 29, 1984
Photo deposition of metals with far UV radiation
IBM40 citations91
US4606935AAug 19, 1986
Process and apparatus for producing high purity oxidation on a semiconductor substrate
IBM8 citations72
US4674442AJun 23, 1987
Process and apparatus for producing high purity oxidation on a semiconductor substrate
IBM2 citations61