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Inventor
CORNUT PHILIPPE
FR
2 patents
Patents
2 patents
US5378439A
Jan 3, 1995
Process for removing gaseous hydrides from a solid support comprising metallic oxides
AIR LIQUIDE
23 citations
86
US4698218A
Oct 6, 1987
Process and the apparatus for the production of silicon hydrides
AIR LIQUIDE
25 citations
85