Inventor
UCHIMURA SHUN-ICHIRO
JP6 patents
Patents
6 patentsUS4758476AJul 19, 1988
Polyimide precursor resin composition and semiconductor device using the same
HITACHI CHEMICAL CO LTD28 citations91
US4645688AFeb 24, 1987
Composition for protective coating material
HITACHI CHEMICAL CO LTD9 citations73
US4511705AApr 16, 1985
Composition for protective coating material
HITACHI CHEMICAL CO LTD10 citations73
US4847358AJul 11, 1989
Process for producing polyamide acid having siloxane bonds and polyimide having siloxane bonds and isoindoloquinazolinedione rings
HITACHI CHEMICAL CO LTD8 citations70
US5271768ADec 21, 1993
Coating for forming an oxide coating
HITACHI CHEMICAL CO LTD13 citations68
US5165957ANov 24, 1992
Process for producing multilayer wiring structure
HITACHI CHEMICAL CO LTD3 citations62