Inventor
MORIYA TAKAHIKO
JP17 patents
⚠️ This page may combine multiple inventors who share the name “MORIYA TAKAHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
11 patentsUS5252133AOct 12, 1993
Vertically oriented CVD apparatus including gas inlet tube having gas injection holes
TOSHIBA KK313 citations98
US5015330AMay 14, 1991
Film forming method and film forming device
TOSHIBA KK141 citations97
US5234869AAug 10, 1993
Method of manufacturing silicon nitride film
TOSHIBA KK72 citations96
US4582563AApr 15, 1986
Process for forming multi-layer interconnections
TOSHIBA KK60 citations94
US5580615ADec 3, 1996
Method of forming a conductive film on an insulating region of a substrate
TOSHIBA KK33 citations92
US5223455AJun 29, 1993
Method of forming refractory metal film
TOSHIBA KK26 citations92
US5048800ASep 17, 1991
Vertical heat treatment apparatus
TOSHIBA KK47 citations89
US4650698AMar 17, 1987
Method of forming a thin film of a metal or metal compound on a substrate
TOSHIBA KK25 citations89
US4746549AMay 24, 1988
Method for forming thin film of refractory material
TOSHIBA KK13 citations74
US4597167AJul 1, 1986
Method of forming a metal film on a selectively diffused layer
TOSHIBA KK10 citations70
US4957880ASep 18, 1990
Method for producing semiconductor device including a refractory metal pattern
TOSHIBA KK5 citations63