P

Inventor

SUZUKI SHOHEI

JP33 patents
⚠️ This page may combine multiple inventors who share the name “SUZUKI SHOHEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

12 patents
US5396067AMar 7, 1995

Scan type electron microscope

NIKON CORP63 citations94
US6124596ASep 26, 2000

Charged-particle-beam projection apparatus and transfer methods

NIKON CORP20 citations92
US6087669AJul 11, 2000

Charged-particle-beam projection-microlithography apparatus and transfer methods

NIKON CORP20 citations92
US6072184AJun 6, 2000

Charged-particle-beam projection methods

NIKON CORP44 citations92
US6027841AFeb 22, 2000

Charged-particle-beam projection-exposure method exhibiting aberration reduction through multiple deflector use

NIKON CORP15 citations74
US5994709ANov 30, 1999

Charged-particle-beam exposure apparatus exhibiting aberration control

NIKON CORP14 citations74
US5894132AApr 13, 1999

Charged-particle-beam projection-exposure apparatus with focus and tilt adjustments

NIKON CORP10 citations74
US6972417B2Dec 6, 2005

Apparatus and methods for patterning a reticle blank by electron-beam inscription with reduced exposure of the reticle blank by backscattered electrons

NIKON CORP7 citations70
US6563125B1May 13, 2003

Charged-particle-beam microlithography apparatus and methods for preventing coulomb effects using the hollow-beam technique

NIKON CORP6 citations63
US6605398B2Aug 12, 2003

Methods and apparatus for controlling beam blur in charged-particle-beam microlithography

NIKON CORP0 citations52
US6096462AAug 1, 2000

Charged-particle-beam-projection-microlithography transfer methods with coulomb effect correction

NIKON CORP1 citations52
US10879029B2Dec 29, 2020

Charged particle device, structure manufacturing method, and structure manufacturing system

NIKON CORP0 citations38

KANEKA CORP

5 patents

HONDA MOTOR CO LTD

4 patents

TAKAOKA TOKO CO LTD

2 patents

TOKYO SHIBAURA ELECTRIC CO

1 patent

HITACHI LTD

1 patent

MITSUBISHI PETROCHEMICAL CO

1 patent

MITSUBISHI CHEM CORP

1 patent

HITACHI CABLE

1 patent

HATTORI MAKOTO

1 patent

MITSUBISHI ELECTRIC CORP

1 patent

TOSHIBA KK

1 patent

MITSUBISHI HEAVY IND LTD

1 patent

MAENO TOMOHARU

1 patent