Inventor
KWON CHUNG-HWAN
KR5 patents
Patents
5 patentsUS6207588B1Mar 27, 2001
Method for simultaneously forming thinner and thicker parts of a dual oxide layer having varying thicknesses
SAMSUNG ELECTRONICS CO LTD17 citations88
US5704984AJan 6, 1998
Chemical vapor deposition apparatus with a heat radiation structure
SAMSUNG ELECTRONICS CO LTD8 citations70
US6340625B1Jan 22, 2002
Method for simultaneously forming thinner and thicker parts of a dual oxide layer having varying thicknesses
SAMSUNG ELECTRONICS CO LTD7 citations69
US5616025AApr 1, 1997
Vertical diffusion furnace having improved gas flow
SAMSUNG ELECTRONICS CO LTD3 citations58
US5711808AJan 27, 1998
Boat for vertical diffusion furnace
SAMSUNG ELECTRONICS CO LTD4 citations54