Inventor
KIM SANG-WOON
KR9 patents
⚠️ This page may combine multiple inventors who share the name “KIM SANG-WOON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
5 patentsUS5728940AMar 17, 1998
Leakage gas detector for semiconductor device and leakage gas detecting method using the same
SAMSUNG ELECTRONICS CO LTD12 citations69
US5940299AAug 17, 1999
System & method for controlling a process-performing apparatus in a semiconductor device-manufacturing process
SAMSUNG ELECTRONICS CO LTD8 citations68
US5753046AMay 19, 1998
Vertical diffusion furnace and cap therefor
SAMSUNG ELECTRONICS CO LTD6 citations60
US5711808AJan 27, 1998
Boat for vertical diffusion furnace
SAMSUNG ELECTRONICS CO LTD4 citations54
US7416997B2Aug 26, 2008
Method of fabricating semiconductor device including removing impurities from silicon nitride layer
SAMSUNG ELECTRONICS CO LTD1 citations52