Inventor
SATOU FUMIO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “SATOU FUMIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS6159288ADec 12, 2000
Method and apparatus for cleaning treatment
TOKYO ELECTRON LTD57 citations95
US5945161AAug 31, 1999
Apparatus and method for supplying process solution to surface of substrate to be processed
TOKYO ELECTRON LTD60 citations95
US6770149B2Aug 3, 2004
Method and apparatus for cleaning treatment
TOKYO ELECTRON LTD19 citations92
US6261378B1Jul 17, 2001
Substrate cleaning unit and cleaning method
TOKYO ELECTRON LTD43 citations91
US6391110B1May 21, 2002
Method and apparatus for cleaning treatment
TOKYO ELECTRON LTD15 citations83
US6398879B1Jun 4, 2002
Method and apparatus for cleaning treatment
TOKYO ELECTRON LTD10 citations73