Inventor
HONDA YOICHI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “HONDA YOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS6159288ADec 12, 2000
Method and apparatus for cleaning treatment
TOKYO ELECTRON LTD57 citations95
US6770149B2Aug 3, 2004
Method and apparatus for cleaning treatment
TOKYO ELECTRON LTD19 citations92
US6443641B2Sep 3, 2002
Substrate process method and substrate process apparatus
TOKYO ELECTRON LTD28 citations92
US6261007B1Jul 17, 2001
Substrate process method and substrate process apparatus
TOKYO ELECTRON LTD43 citations92
US6391110B1May 21, 2002
Method and apparatus for cleaning treatment
TOKYO ELECTRON LTD15 citations83
US6398879B1Jun 4, 2002
Method and apparatus for cleaning treatment
TOKYO ELECTRON LTD10 citations73