Inventor
YAMAGUCHI KIYOMITSU
JP9 patents
⚠️ This page may combine multiple inventors who share the name “YAMAGUCHI KIYOMITSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS6159288ADec 12, 2000
Method and apparatus for cleaning treatment
TOKYO ELECTRON LTD57 citations95
US5945161AAug 31, 1999
Apparatus and method for supplying process solution to surface of substrate to be processed
TOKYO ELECTRON LTD60 citations95
US6770149B2Aug 3, 2004
Method and apparatus for cleaning treatment
TOKYO ELECTRON LTD19 citations92
US5906860AMay 25, 1999
Apparatus for treating a substrate with resist and resist-treating method
TOKYO ELECTRON LTD49 citations92
US6062240AMay 16, 2000
Treatment device
TOKYO ELECTRON LTD45 citations91
US6391110B1May 21, 2002
Method and apparatus for cleaning treatment
TOKYO ELECTRON LTD15 citations83
US6398879B1Jun 4, 2002
Method and apparatus for cleaning treatment
TOKYO ELECTRON LTD10 citations73
US11427920B2Aug 30, 2022
Electrolytic processing jig and electrolytic processing method
TOKYO ELECTRON LTD0 citations51