Inventor
MATSUDA YOSHITAKA
JP10 patents
⚠️ This page may combine multiple inventors who share the name “MATSUDA YOSHITAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS6159288ADec 12, 2000
Method and apparatus for cleaning treatment
TOKYO ELECTRON LTD57 citations95
US5945161AAug 31, 1999
Apparatus and method for supplying process solution to surface of substrate to be processed
TOKYO ELECTRON LTD60 citations95
US6451515B2Sep 17, 2002
Substrate treating method
TOKYO ELECTRON LTD31 citations92
US5906860AMay 25, 1999
Apparatus for treating a substrate with resist and resist-treating method
TOKYO ELECTRON LTD49 citations92
US6261378B1Jul 17, 2001
Substrate cleaning unit and cleaning method
TOKYO ELECTRON LTD43 citations91
US6398879B1Jun 4, 2002
Method and apparatus for cleaning treatment
TOKYO ELECTRON LTD10 citations73