Inventor
MOLEBASH JOHN S
US12 patents
Patents
12 patentsUS5885353AMar 23, 1999
Thermal conditioning apparatus
MICRON TECHNOLOGY INC170 citations98
US6403933B1Jun 11, 2002
Thermal conditioning apparatus
MICRON TECHNOLOGY INC28 citations95
US6221157B1Apr 24, 2001
Spin coating bowl exhaust system
MICRON TECHNOLOGY INC19 citations92
US6051074AApr 18, 2000
Thermal conditioning apparatus
MICRON TECHNOLOGY INC18 citations92
US5769945AJun 23, 1998
Spin coating bowl exhaust system
MICRON TECHNOLOGY INC31 citations92
US5759007AJun 2, 1998
Notch finder and combination wafer transfer machine
MICRON TECHNOLOGY INC20 citations86
US6107609AAug 22, 2000
Thermal conditioning apparatus
MICRON TECHNOLOGY INC12 citations81
US6090209AJul 18, 2000
Thermal conditioning apparatus
MICRON TECHNOLOGY INC13 citations81
US6171402B1Jan 9, 2001
Thermal conditioning apparatus
MICRON TECHNOLOGY INC7 citations73
US6162294ADec 19, 2000
Spin coating bowl exhaust system
MICRON TECHNOLOGY INC7 citations73
US6150638ANov 21, 2000
Thermal conditioning apparatus
MICRON TECHNOLOGY INC3 citations73
US6132802AOct 17, 2000
Methods for exhausting a wafer coating apparatus
MICRON TECHNOLOGY INC8 citations73