Inventor
HAYES BRUCE L
US22 patents
Patents
22 patentsUS5885353AMar 23, 1999
Thermal conditioning apparatus
MICRON TECHNOLOGY INC170 citations98
US6107608AAug 22, 2000
Temperature controlled spin chuck
MICRON TECHNOLOGY INC77 citations96
US6494953B2Dec 17, 2002
Dispenser apparatus and associated method of heating
MICRON TECHNOLOGY INC46 citations95
US6403933B1Jun 11, 2002
Thermal conditioning apparatus
MICRON TECHNOLOGY INC28 citations95
US5861061AJan 19, 1999
Spin coating bowl
MICRON TECHNOLOGY INC46 citations94
US6221157B1Apr 24, 2001
Spin coating bowl exhaust system
MICRON TECHNOLOGY INC19 citations92
US6051074AApr 18, 2000
Thermal conditioning apparatus
MICRON TECHNOLOGY INC18 citations92
US5954877ASep 21, 1999
Soft impact dispense nozzle
MICRON TECHNOLOGY INC35 citations92
US5769945AJun 23, 1998
Spin coating bowl exhaust system
MICRON TECHNOLOGY INC31 citations92
US6168660B1Jan 2, 2001
Spin coating bowl
MICRON TECHNOLOGY INC24 citations91
US5849084ADec 15, 1998
Spin coating dispense arm assembly
MICRON TECHNOLOGY INC33 citations91
US6140253AOct 31, 2000
Spin coating bowl
MICRON TECHNOLOGY INC12 citations81
US6107609AAug 22, 2000
Thermal conditioning apparatus
MICRON TECHNOLOGY INC12 citations81
US6090209AJul 18, 2000
Thermal conditioning apparatus
MICRON TECHNOLOGY INC13 citations81
US6183941B1Feb 6, 2001
Soft impact dispense method
MICRON TECHNOLOGY INC6 citations74
US6171402B1Jan 9, 2001
Thermal conditioning apparatus
MICRON TECHNOLOGY INC7 citations73
US6162294ADec 19, 2000
Spin coating bowl exhaust system
MICRON TECHNOLOGY INC7 citations73
US6150638ANov 21, 2000
Thermal conditioning apparatus
MICRON TECHNOLOGY INC3 citations73
US6132802AOct 17, 2000
Methods for exhausting a wafer coating apparatus
MICRON TECHNOLOGY INC8 citations73
US6199562B1Mar 13, 2001
Method and apparatus for cleaning a dispense line
MICRON TECHNOLOGY INC4 citations72
US6162507ADec 19, 2000
Spin coating dispense arm assembly
MICRON TECHNOLOGY INC5 citations72
US6303526B1Oct 16, 2001
Temperature controlled spin chuck
MICRON TECHNOLOGY INC2 citations63