Inventor
DAVLIN JOHN T
US10 patents
Patents
10 patentsUS6221157B1Apr 24, 2001
Spin coating bowl exhaust system
MICRON TECHNOLOGY INC19 citations92
US5769945AJun 23, 1998
Spin coating bowl exhaust system
MICRON TECHNOLOGY INC31 citations92
US6680078B2Jan 20, 2004
Method for dispensing flowable substances on microelectronic substrates
MICRON TECHNOLOGY INC35 citations91
US6461983B1Oct 8, 2002
Method for pretreating a substrate prior to application of a polymeric coat
MICRON TECHNOLOGY INC17 citations89
US6162294ADec 19, 2000
Spin coating bowl exhaust system
MICRON TECHNOLOGY INC7 citations73
US6132802AOct 17, 2000
Methods for exhausting a wafer coating apparatus
MICRON TECHNOLOGY INC8 citations73
US6559072B2May 6, 2003
Develop processing method of a resist surface of a substrate for reduced processing time and reduced defect density
MICRON TECHNOLOGY INC5 citations72
US6946407B2Sep 20, 2005
Method for pretreating a substrate prior to application of a polymeric coat
MICRON TECHNOLOGY INC6 citations70
US6784120B2Aug 31, 2004
Method for pretreating a substrate prior to application of a polymeric coat
MICRON TECHNOLOGY INC11 citations70
US6806209B2Oct 19, 2004
Develop processing method of a resist surface on a substrate for reduced processing time and reduced defect density
MICRON TECHNOLOGY INC0 citations50