Inventor
NOMOTO KATSUHIKO
JP11 patents
Patents
11 patentsUS6242686B1Jun 5, 2001
Photovoltaic device and process for producing the same
SHARP KK118 citations97
US6142096ANov 7, 2000
Electronic device manufacturing apparatus and method for manufacturing electronic device
SHARP KK48 citations95
US6009828AJan 4, 2000
Method for forming a thin semiconductor film and a plasma CVD apparatus to be used in the method
SHARP KK21 citations91
US5487786AJan 30, 1996
Plasma chemical vapor deposition device capable of suppressing generation of polysilane powder
SHARP KK24 citations89
US7032536B2Apr 25, 2006
Thin film formation apparatus including engagement members for support during thermal expansion
SHARP KK12 citations84
US7195673B2Mar 27, 2007
Plasma CVD apparatus, and method for forming film and method for forming semiconductor device using the same
SHARP KK11 citations82
US6979589B2Dec 27, 2005
Silicon-based thin-film photoelectric conversion device and method of manufacturing thereof
SHARP KK11 citations73
US5618758AApr 8, 1997
Method for forming a thin semiconductor film and a plasma CVD apparatus to be used in the method
SHARP KK12 citations72
USRE39064EApr 18, 2006
Electronic device manufacturing apparatus and method for manufacturing electronic device
SHARP KK2 citations62
US7565880B2Jul 28, 2009
Plasma CVD apparatus, and method for forming film and method for forming semiconductor device using the same
SHARP KK4 citations61
US7722738B2May 25, 2010
Semiconductor device manufacturing unit and semiconductor device manufacturing method
SHARP KK1 citations52