Inventor
KENT ERIC R
US7 patents
Patents
7 patentsUS6130016AOct 10, 2000
Method for forming semiconductor structures using a calibrating reticle
ADVANCED MICRO DEVICES INC19 citations89
US6361599B1Mar 26, 2002
Mechanism for dispensing liquid onto an integrated circuit wafer with minimized back-splash
ADVANCED MICRO DEVICES INC2 citations60
US6238747B1May 29, 2001
Mechanism for dispensing liquid onto an integrated circuit wafer with minimized back-splash
ADVANCED MICRO DEVICES INC4 citations60
US6082379AJul 4, 2000
Mechanism for cleaning an integrated circuit wafer hot plate while the hot plate is at operating temperature
ADVANCED MICRO DEVICES INC3 citations60
US6368985B1Apr 9, 2002
Dual track/stepper interface configuration for wafer processing
ADVANCED MICRO DEVICES INC5 citations58
US6299688B1Oct 9, 2001
Developer nozzle clean combs
ADVANCED MICRO DEVICES INC0 citations49
US6360959B1Mar 26, 2002
Dual resist dispense nozzle for wafer tracks
ADVANCED MICRO DEVICES INC0 citations48