Inventor
DOI HIDEAKI
JP24 patents
⚠️ This page may combine multiple inventors who share the name “DOI HIDEAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
18 patentsUS5801965ASep 1, 1998
Method and system for manufacturing semiconductor devices, and method and system for inspecting semiconductor devices
HITACHI LTD230 citations99
US6438438B1Aug 20, 2002
Method and system for manufacturing semiconductor devices, and method and system for inspecting semiconductor devices
HITACHI LTD84 citations98
US6614923B1Sep 2, 2003
Pattern inspecting method and apparatus thereof, and pattern inspecting method on basis of electron beam images and apparatus thereof
HITACHI LTD49 citations96
US6546308B2Apr 8, 2003
Method and system for manufacturing semiconductor devices, and method and system for inspecting semiconductor devices
HITACHI LTD61 citations96
US6087673AJul 11, 2000
Method of inspecting pattern and apparatus thereof
HITACHI LTD58 citations96
US5754621AMay 19, 1998
X-ray inspection method and apparatus, prepreg inspecting method, and method for fabricating multi-layer printed circuit board
HITACHI LTD56 citations95
US4628531ADec 9, 1986
Pattern checking apparatus
HITACHI LTD100 citations95
US7263216B2Aug 28, 2007
Pattern inspecting method and apparatus thereof, and pattern inspecting method on basis of electron beam images and apparatus thereof
HITACHI LTD16 citations92
US6650409B1Nov 18, 2003
Semiconductor device producing method, system for carrying out the same and semiconductor work processing apparatus included in the same system
HITACHI LTD39 citations92
US6236057B1May 22, 2001
Method of inspecting pattern and apparatus thereof with a differential brightness image detection
HITACHI LTD15 citations92
US5331407AJul 19, 1994
Method and apparatus for detecting a circuit pattern
HITACHI LTD25 citations92
US4908871AMar 13, 1990
Pattern inspection system
HITACHI LTD46 citations92
US6831998B1Dec 14, 2004
Inspection system for circuit patterns and a method thereof
HITACHI LTD26 citations90
US6622054B1Sep 16, 2003
Method monitoring a quality of electronic circuits and its manufacturing condition and system for it
HITACHI LTD36 citations90
US6072899AJun 6, 2000
Method and device of inspecting three-dimensional shape defect
HITACHI LTD32 citations90
US4962541AOct 9, 1990
Pattern test apparatus
HITACHI LTD22 citations82
US6376854B2Apr 23, 2002
Method of inspecting a pattern on a substrate
HITACHI LTD8 citations74
US5930382AJul 27, 1999
Wiring pattern inspecting method and system for carrying out the same
HITACHI LTD15 citations70
KUREHA CHEMICAL IND CO LTD
4 patentsUS4975223ADec 4, 1990
Optical material
KUREHA CHEMICAL IND CO LTD8 citations74
US4341837AJul 27, 1982
Laminar thermoplastic resin structure
KUREHA CHEMICAL IND CO LTD11 citations69
US5086140AFeb 4, 1992
Optical material formed by casting polymerization of a phenyl phosphine monomer
KUREHA CHEMICAL IND CO LTD2 citations63
US4504631AMar 12, 1985
Photoresist material
KUREHA CHEMICAL IND CO LTD3 citations58