Inventor
LEY ANA
US3 patents
Patents
3 patentsUS6576404B2Jun 10, 2003
Carbon-doped hard mask and method of passivating structures during semiconductor device fabrication
LSI LOGIC CORP13 citations81
US6846569B2Jan 25, 2005
Carbon-doped hard mask and method of passivating structures during semiconductor device fabrication
LSI LOGIC CORP9 citations71
US5736418AApr 7, 1998
Method for fabricating a field effect transistor using microtrenches to control hot electron effects
LSI LOGIC CORP3 citations60