Inventor

HECTOR SCOTT DANIEL

US3 patents

⚠️ This page may combine multiple inventors who share the name “HECTOR SCOTT DANIEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FREESCALE SEMICONDUCTOR INC

2 patents

US6986971B2Jan 17, 2006

Reflective mask useful for transferring a pattern using extreme ultraviolet (EUV) radiation and method of making the same

FREESCALE SEMICONDUCTOR INC23 citations90

US6835671B2Dec 28, 2004

Method of making an integrated circuit using an EUV mask formed by atomic layer deposition

FREESCALE SEMICONDUCTOR INC6 citations61

MOTOROLA INC

1 patent

US6596465B1Jul 22, 2003

Method of manufacturing a semiconductor component

MOTOROLA INC47 citations89