Inventor
VOLPE GERALD
US3 patents
Patents
3 patentsUS6831768B1Dec 14, 2004
Using time and/or power modulation to achieve dose gray-scaling in optical maskless lithography
ASML HOLDING NV39 citations94
US6985280B2Jan 10, 2006
Using time and/or power modulation to achieve dose gray-scaling in optical maskless lithography
ASML HOLDING NV4 citations72
US7463402B2Dec 9, 2008
Using time and/or power modulation to achieve dose gray-scale in optical maskless lithography
ASML HOLDING NV1 citations61