Inventor

STORM ARJEN BENJAMIN

BE4 patents

⚠️ This page may combine multiple inventors who share the name “STORM ARJEN BENJAMIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM INT

2 patents

US6770851B2Aug 3, 2004

Method and apparatus for the treatment of substrates

ASM INT37 citations91

US6884317B2Apr 26, 2005

Method and installation for etching a substrate

ASM INT4 citations55

ASML NETHERLANDS BV

2 patents

US12476075B2Nov 18, 2025

Stack alignment techniques

ASML NETHERLANDS BV0 citations51

US12381062B2Aug 5, 2025

Tool for testing an electron-optical assembly

ASML NETHERLANDS BV0 citations40