Inventor
YAMAGUCHI ATSUMI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “YAMAGUCHI ATSUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
6 patentsUS6337175B1Jan 8, 2002
Method for forming resist pattern
MITSUBISHI ELECTRIC CORP40 citations91
US5981149ANov 9, 1999
Method for manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP34 citations91
US6136479AOct 24, 2000
Method of forming photomask and pattern and method of forming a semiconductor device
MITSUBISHI ELECTRIC CORP7 citations72
US5902718AMay 11, 1999
Methods and developer for developing a positive photoresist
MITSUBISHI ELECTRIC CORP5 citations61
US6518196B2Feb 11, 2003
Method of manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP0 citations52
US6607992B2Aug 19, 2003
Antireflection coating and semiconductor device manufacturing method
MITSUBISHI ELECTRIC CORP1 citations51
RENESAS TECH CORP
4 patentsUS6774043B2Aug 10, 2004
Method of manufacturing semiconductor device
RENESAS TECH CORP19 citations83
US6938238B2Aug 30, 2005
Method of manufacturing electronic device
RENESAS TECH CORP7 citations73
US6849486B2Feb 1, 2005
Method of manufacturing a thinned gate electrode utilizing protective films and etching
RENESAS TECH CORP2 citations62
US6960481B2Nov 1, 2005
Evaluation method
RENESAS TECH CORP4 citations61