Inventor
FUJIMOTO KIWAMU
JP4 patents
Patents
4 patentsUS7473377B2Jan 6, 2009
Plasma processing method
TOKYO ELECTRON LTD14 citations80
US6967171B2Nov 22, 2005
Insulation film etching method
TOKYO ELECTRON LTD9 citations69
US7432207B2Oct 7, 2008
Method for etching object to be processed
TOKYO ELECTRON LTD4 citations59
US7507673B2Mar 24, 2009
Method for etching an object to be processed
TOKYO ELECTRON LTD0 citations48