P

Inventor

WADA NOBUHIRO

JP9 patents
⚠️ This page may combine multiple inventors who share the name “WADA NOBUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents
US8383000B2Feb 26, 2013

Substrate processing apparatus, method for measuring distance between electrodes, and storage medium storing program

TOKYO ELECTRON LTD7 citations83
US6967171B2Nov 22, 2005

Insulation film etching method

TOKYO ELECTRON LTD9 citations69
US9524847B2Dec 20, 2016

Substrate processing apparatus

TOKYO ELECTRON LTD1 citations50

MITSUBISHI ELECTRIC CORP

3 patents
US12510276B2Dec 30, 2025

Air-conditioning apparatus

MITSUBISHI ELECTRIC CORP0 citations60
US12331946B2Jun 17, 2025

Air-conditioning system

MITSUBISHI ELECTRIC CORP0 citations51
US11808476B2Nov 7, 2023

Relay unit heat exchanger

MITSUBISHI ELECTRIC CORP0 citations50

FUJITSU TEN LTD

1 patent
US7120024B2Oct 10, 2006

Electronic control device

FUJITSU TEN LTD36 citations88

YOSHIMURA AKIHIRO

1 patent
US9455125B2Sep 27, 2016

Substrate processing apparatus

YOSHIMURA AKIHIRO3 citations70

WADA NOBUHIRO

1 patent
US8592319B2Nov 26, 2013

Substrate processing method and substrate processing apparatus

WADA NOBUHIRO0 citations43