Inventor
JACOBS JOHANNES HENRICUS WILHE
NL10 patents
Patents
10 patentsUS7411654B2Aug 12, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV22 citations92
US7251013B2Jul 31, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV21 citations92
US7420194B2Sep 2, 2008
Lithographic apparatus and substrate edge seal
ASML NETHERLANDS BV10 citations84
US7411658B2Aug 12, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations73
US7378025B2May 27, 2008
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations73
US7133114B2Nov 7, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations73
US7274431B2Sep 25, 2007
Lithographic projection apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations60
US7256863B2Aug 14, 2007
Sealing assembly, a lithographic projection apparatus, and a device manufacturing method
ASML NETHERLANDS BV2 citations60
US7126664B2Oct 24, 2006
Lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV4 citations60
US7361911B2Apr 22, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations59